No. | Item | Parameter |
1 | Dimensions | L5000mm*W2600mm*H2600mm |
2 | C/T | 9S |
3 | 3D camera positioning accuracy | ¡À0.1mm |
4 | USC cleaning efficiency | 98% removal rate of 3um dust particles 98% removal rate of 6um dust particles |
5 | Yield | 99% |
6 | Power supply requirements | 220V£¬ 50Hz£¬16.5kw |
7 | Air source requirements | ¡Ý0.5MPa |